Kód: 06734771
X-Ray Metrology in Semiconductor Manufacturing
Autor Brian K. Tanner
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin ... celý popis
- Jazyk:
Angličtina - Vazba: Pevná
- Počet stran: 296
Nakladatelství: Taylor & Francis Inc, 2006
- Více informací o knize
6724 Kč
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Více informací o knize X-Ray Metrology in Semiconductor Manufacturing
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Anotace knihy
Emphasizes on practical metrology, with real world examples from the semiconductor and magnetics industries. This book discusses the techniques, theory, and applications of X-ray metrology in semiconductors and other advanced thin films. It covers the essential metrological questions of precision and repeatability, absolute accuracy and spot size.
Parametry knihy
Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Technology: general issues Instruments & instrumentation engineering
6724 Kč
- Plný název: X-Ray Metrology in Semiconductor Manufacturing
- Autor: Brian K. Tanner
- Jazyk: Angličtina
- Vazba: Pevná
- Počet stran: 296
- EAN: 9780849339288
- ISBN: 9780849339288
- ID: 06734771
- Nakladatelství: Taylor & Francis Inc
- Hmotnost: 586 g
- Rozměry: 245 × 162 × 21 mm
- Datum vydání: 24. January 2006
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