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Anotace knihy

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

Parametry knihy

Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Electronics & communications engineering Electronics engineering

• Plný název: Materials and Processes for Submicron Technologies
• Autor: J. M. Martinez-Duart, R. Madar, R. a. Levy
• Jazyk: Angličtina
• Vazba: Pevná
• Počet stran: 180
• EAN: 9780080436173
• ISBN: 008043617X
• ID: 04490729
• Nakladatelství: Elsevier Science & Technology
• Hmotnost: 570 g
• Rozměry: 279 × 210 mm
• Datum vydání: 03. November 1999

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