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Anotace knihy

This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Parametry knihy

Zařazení knihy Knihy v angličtině Mathematics & science Physics Materials / States of matter

• Plný název: Fundamental Electron Interactions with Plasma Processing Gases
• Autor: Loucas G. Christophorou, James K. Olthoff
• Jazyk: Angličtina
• Vazba: Pevná
• Počet stran: 781
• EAN: 9780306480379
• ISBN: 0306480379
• ID: 01379700
• Nakladatelství: Springer Science+Business Media
• Hmotnost: 2850 g
• Rozměry: 235 × 155 × 47 mm
• Datum vydání: 31. December 2003

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