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Více informací o knize Temperature Measurement during Millisecond Annealing

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Anotace knihy

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method's suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.§

Parametry knihy

Zařazení knihy Knihy v angličtině Mathematics & science Chemistry Analytical chemistry

• Plný název: Temperature Measurement during Millisecond Annealing
• Podnázev: Ripple Pyrometry for Flash Lamp Annealers
• Autor: Denise Reichel
• Jazyk: Angličtina
• Vazba: Brožovaná
• Počet stran: 112
• EAN: 9783658113872
• ISBN: 3658113871
• ID: 09524561
• Nakladatelství: Springer
• Hmotnost: 1906 g
• Rozměry: 7 × 148 × 210 mm
• Datum vydání: 08. January 2016

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