Kód: 03025946
Materials and Failures in MEMS and NEMS
Autor Baldev Raj
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. ... celý popis
- Jazyk:
Angličtina - Vazba: Pevná
- Počet stran: 432
Nakladatelství: John Wiley & Sons Inc, 2015
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Více informací o knize Materials and Failures in MEMS and NEMS
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Anotace knihy
The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process.
Parametry knihy
Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Electronics & communications engineering Electronics engineering
6006 Kč
- Plný název: Materials and Failures in MEMS and NEMS
- Autor: Baldev Raj
- Jazyk: Angličtina
- Vazba: Pevná
- Počet stran: 432
- EAN: 9781119083603
- ISBN: 9781119083603
- ID: 03025946
- Nakladatelství: John Wiley & Sons Inc
- Hmotnost: 1074 g
- Rozměry: 256 × 182 × 28 mm
- Datum vydání: 25. September 2015
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