Kód: 01428994
Atomic Layer Deposition for Semiconductors
Autor Cheol Seong Hwang
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. ... celý popis
- Jazyk:
Angličtina - Vazba: Pevná
- Počet stran: 263
Nakladatelství: Springer-Verlag New York Inc., 2013
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Anotace knihy
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines.
Parametry knihy
Zařazení knihy Knihy v angličtině Technology, engineering, agriculture Electronics & communications engineering Electronics engineering
4002 Kč
- Plný název: Atomic Layer Deposition for Semiconductors
- Autor: Cheol Seong Hwang
- Jazyk: Angličtina
- Vazba: Pevná
- Počet stran: 263
- EAN: 9781461480532
- ISBN: 1461480531
- ID: 01428994
- Nakladatelství: Springer-Verlag New York Inc.
- Hmotnost: 5384 g
- Rozměry: 235 × 155 × 19 mm
- Datum vydání: 19. October 2013
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